我們的服務
SERVERS
乾式蝕刻
乾式蝕刻: 2300Platform、Argos、Gamma 1. Tool Move in. 2. BKM/ CIP check and installation. 3. Chamber parts installation. 4. Tool power on, and PCW/ Bulk gas/ chiller turn on. 5. ATM/VTM Robot leveling and calibration. 6. Chamber and gas line pump down. 7. Leak rate check. 8. Tool sign off. 9. RF calibration. 10. TCW/TCR temperature check. 11. Manometer check. 12. TCP/ Bias RF match capacitance calibration. 13. On wafer. 14. Data collection. 15. Troubleshooting. 16. On duty. 17. Tool upgrade. 18. Robot transfer iron-man check.
濕式蝕刻
濕式蝕刻: EOS系列、DV系列 1. Tool Move-in. 2. BKM/ CIP check and installation. 3. Chamber / ICDS parts installation. 4. Leak sensor installs/check. 5. Tool power on, and UPW / PCW / Bulk gas/chiller turn on. 6. Exhaust turn-on / adjustment 7. FFU turn-on / adjustment 8. EFEM/Corridor Robot leveling and calibration. 9. Chuck/Dispenser leveling and calibration. 10. N2 flow check and calibration. 11. ION Check and calibration. 12. Downflow check and calibration. 13. Chemical/DI/IPA turn on / flow adjustment/temperature check. 14. Tool sign-off. 15. Troubleshooting. 16. Robot transfer iron-man check. 17. Tool Disconnect 18. Chamber PM
選擇我們的原因
Why choose FonDa Tech
十年與科林研發的優良服務， buddy system 的經驗傳承與學習資料庫
讓我們為您帶來效益
Benefit each other
堅持優良的裝機品質 Adhere to excellent installed quality
快速反應的客戶服務 Responsive customer service